股本结构
单位：万股
| 公告日期 | 2025-11-05 | 2025-11-05 | 2025-08-06 | 2025-08-06 | 2025-05-22 | 2025-05-07 |
|---|---|---|---|---|---|---|
| 证券总股本 | 6016.25 | 6015.91 | 6016.18 | 6016.06 | 6000.03 | 5829.22 |
| 普通股本 | 6016.25 | 6015.91 | 6016.18 | 6016.06 | 6000.03 | 5829.22 |
| 优先股 | 未披露 | 未披露 | 未披露 | 未披露 | 未披露 | 未披露 |
| 其他 | 未披露 | 未披露 | 未披露 | 未披露 | 未披露 | 未披露 |
| 变动日期 | 2025-10-30 | 2025-09-30 | 2025-07-31 | 2025-06-30 | 2025-05-16 | 2025-05-01 |
注释：中概股证券总股本=普通股股本/
存托凭证比例
历史变动
| 公告日期 | 变动后普通股本（万股） | 变动后优先股（万股） | 变动原因 | 变动日期 |
|---|---|---|---|---|
| 2025-11-05 | 6016.25 | 未披露 | 定期报告 | 2025-10-30 |
| 2025-11-05 | 6015.91 | 未披露 |
更多>>
From June 30, 2025 to September 30, 2025
Net issuance under employee stock plans
|
2025-09-30 |
| 2025-08-06 | 6016.18 | 未披露 | 定期报告 | 2025-07-31 |
| 2025-08-06 | 6016.06 | 未披露 |
更多>>
From March 31, 2025 to June 30, 2025
Settlement of the 2027 Notes
Net issuance under employee stock plans
|
2025-06-30 |
| 2025-05-22 | 6000.03 | 未披露 | 定期报告 | 2025-05-16 |
| 2025-05-07 | 5829.22 | 未披露 | 定期报告 | 2025-05-01 |
| 2025-05-07 | 5829.15 | 未披露 |
更多>>
From December 31, 2024 to March 31, 2025
Net issuance under employee stock plans
Settlement of the 2025 Notes
|
2025-03-31 |
| 2025-03-20 | 5793.65 | 未披露 | 定期报告 | 2025-03-12 |
| 2025-02-14 | 5793.58 | 未披露 | 定期报告 | 2025-02-07 |
| 2025-02-14 | 5682.79 | 未披露 |
更多>>
From December 31, 2023 to December 31, 2024
Net issuance under employee stock plans
|
2024-12-31 |
| 2024-11-06 | 5677.82 | 未披露 | 定期报告 | 2024-10-31 |
| 2024-11-06 | 5677.81 | 未披露 |
更多>>
From June 30, 2024 to September 30, 2024
Net issuance under employee stock plans
|
2024-09-30 |
| 2024-08-06 | 5678.48 | 未披露 | 定期报告 | 2024-07-30 |
| 2024-08-06 | 5677.33 | 未披露 |
更多>>
From March 31, 2024 to June 30, 2024
Net issuance under employee stock plans
|
2024-06-30 |
| 2024-05-07 | 5663.77 | 未披露 | 定期报告 | 2024-05-01 |
| 2024-05-07 | 5663.75 | 未披露 |
更多>>
From December 31, 2023 to March 31, 2024
Net issuance under employee stock plans
|
2024-03-31 |
| 2024-03-21 | 5631.26 | 未披露 | 定期报告 | 2024-03-13 |
| 2024-03-21 | 5635.49 | 未披露 | 定期报告 | 2024-03-08 |
| 2024-02-16 | 5636.70 | 未披露 | 定期报告 | 2024-02-13 |
| 2024-02-16 | 5636.41 | 未披露 |
更多>>
From December 31, 2022 to December 31, 2023
Net issuance under employee stock plans
Partial extinguishment of 2025 and 2027 Notes
|
2023-12-31 |
| 2023-11-06 | 5634.17 | 未披露 | 定期报告 | 2023-10-31 |
| 2023-11-06 | 5633.67 | 未披露 |
更多>>
From June 30, 2023 to September 30, 2023
Net issuance under employee stock plans
|
2023-09-30 |
| 2023-08-07 | 5634.55 | 未披露 | 定期报告 | 2023-08-01 |
| 2023-08-07 | 5633.79 | 未披露 |
更多>>
From March 31, 2023 to June 30, 2023
Net issuance under employee stock plans
Partial extinguishment of 2025 and 2027 Notes
|
2023-06-30 |
| 2023-05-08 | 5169.30 | 未披露 |
更多>>
From December 31, 2022 to March 31, 2023
Net issuance under employee stock plans
|
2023-03-31 |
| 2023-03-23 | 5157.63 | 未披露 | 定期报告 | 2023-03-15 |
| 2023-02-22 | 5166.14 | 未披露 | 定期报告 | 2023-02-13 |
| 2023-02-22 | 5166.04 | 未披露 |
更多>>
From December 31, 2021 to December 31, 2022
Net issuance under employee stock plans
|
2022-12-31 |
| 2022-11-07 | 5142.52 | 未披露 | 定期报告 | 2022-11-02 |
| 2022-11-07 | 5142.02 | 未披露 |
更多>>
From June 30, 2022 to September 30, 2022
Net issuance under employee stock plans
|
2022-09-30 |
| 2022-08-08 | 5142.52 | 未披露 |
更多>>
From March 31, 2022 to June 30, 2022
Net issuance under employee stock plans
|
2022-06-30 |
| 2022-05-09 | 5124.30 | 未披露 |
更多>>
From December 31, 2021 to March 31, 2022
Net issuance under employee stock plans
|
2022-03-31 |
| 2022-03-24 | 5057.87 | 未披露 | 定期报告 | 2022-03-16 |
| 2022-03-24 | 5064.10 | 未披露 | 定期报告 | 2022-03-11 |
| 2022-02-18 | 5065.34 | 未披露 | 定期报告 | 2022-02-11 |
| 2022-02-18 | 5065.29 | 未披露 |
更多>>
From December 31, 2020 to December 31, 2021
Net issuance under employee stock plans
|
2021-12-31 |
| 2021-11-02 | 5050.40 | 未披露 | 定期报告 | 2021-10-27 |
| 2021-11-02 | 5032.10 | 未披露 |
更多>>
From June 30, 2021 to September 30, 2021
Net issuance under employee stock plans
|
2021-09-30 |
| 2021-08-03 | 5034.88 | 未披露 |
更多>>
From March 31, 2021 to June 30, 2021
Net issuance under employee stock plans
|
2021-06-30 |
| 2021-05-04 | 5018.26 | 未披露 |
更多>>
from December 31, 2020 to March 31, 2021
Net issuance under employee stock plans
|
2021-03-31 |
| 2021-03-17 | 4973.09 | 未披露 | 定期报告 | 2021-03-09 |
| 2021-02-22 | 4972.41 | 未披露 | 定期报告 | 2021-02-11 |
| 2021-02-22 | 4972.38 | 未披露 |
更多>>
From December 31, 2019 to December 31, 2020
Net issuance under employee stock plans
|
2020-12-31 |
| 2020-10-27 | 4961.22 | 未披露 |
更多>>
From June 30,2020 to September 30,2020
Net issuance under employee stock plans
|
2020-09-30 |
| 2020-08-10 | 4961.89 | 未披露 | 定期报告 | 2020-08-03 |
| 2020-08-03 | 4961.91 | 未披露 | 定期报告 | 2020-07-29 |
| 2020-08-03 | 4961.89 | 未披露 |
更多>>
From March 31, 2020 to June 30, 2020
Net issuance under employee stock plans
|
2020-06-30 |
| 2020-05-07 | 4942.84 | 未披露 |
更多>>
from December 31, 2019 to March 31, 2020
Net issuance under employee stock plans
|
2020-03-31 |
| 2020-03-18 | 4902.03 | 未披露 | 定期报告 | 2020-03-10 |
| 2020-02-21 | 4900.00 | 未披露 | 定期报告 | 2020-02-14 |
| 2020-02-21 | 4899.43 | 未披露 |
更多>>
from December 31, 2018 to December 31, 2019
Net issuance under employee stock plans
|
2019-12-31 |
| 2019-11-04 | 4890.30 | 未披露 |
更多>>
from June 30, 2019 to September 30, 2019
Net issuance under employee stock plans
|
2019-09-30 |
| 2019-08-05 | 4897.14 | 未披露 | 定期报告 | 2019-07-25 |
| 2019-08-05 | 4897.10 | 未披露 |
更多>>
from March 31, 2019 to June 30, 2019
Net issuance under employee stock plans
|
2019-06-30 |
| 2019-05-07 | 4867.52 | 未披露 |
更多>>
from December 31, 2018 to March 31, 2019
Net issuance under employee stock plans
|
2019-03-31 |
| 2019-03-19 | 4803.40 | 未披露 | 定期报告 | 2019-03-11 |
| 2019-02-25 | 4803.86 | 未披露 | 定期报告 | 2019-02-15 |
| 2019-02-25 | 4802.47 | 未披露 |
更多>>
from December 31, 2017 to December 31, 2018
Net issuance under employee stock plans
Purchases of common stock
|
2018-12-31 |
| 2018-11-01 | 4779.30 | 未披露 | 定期报告 | 2018-09-30 |
| 2018-08-02 | 4879.13 | 未披露 | 定期报告 | 2018-07-25 |
| 2018-08-02 | 4873.46 | 未披露 | 定期报告 | 2018-06-30 |
| 2018-05-07 | 4869.20 | 未披露 | 定期报告 | 2018-04-30 |
| 2018-05-07 | 4869.14 | 未披露 | 定期报告 | 2018-03-31 |
| 2018-03-19 | 4812.59 | 未披露 | 定期报告 | 2018-03-12 |
| 2018-02-21 | 4815.69 | 未披露 | 定期报告 | 2018-02-14 |
| 2018-02-21 | 4814.44 | 未披露 |
更多>>
from December 31, 2016 to December 31, 2017
Net issuance under employee stock plans
Stock issuance for business acquisition
Purchases of common stock
|
2017-12-31 |
| 2017-11-03 | 4830.19 | 未披露 | 定期报告 | 2017-10-25 |
| 2017-11-03 | 4829.43 | 未披露 | 定期报告 | 2017-09-30 |
| 2017-08-03 | 4842.06 | 未披露 | 定期报告 | 2017-07-26 |
| 2017-08-03 | 4838.22 | 未披露 | 定期报告 | 2017-06-30 |
| 2017-05-05 | 4056.85 | 未披露 | 定期报告 | 2017-03-31 |
| 2017-03-17 | 4056.97 | 未披露 | 定期报告 | 2017-03-13 |
| 2017-03-13 | 4057.40 | 未披露 | 定期报告 | 2017-02-28 |
| 2017-02-22 | 4059.54 | 未披露 | 定期报告 | 2017-02-14 |
| 2017-02-03 | 4056.41 | 未披露 | 定期报告 | 2017-01-31 |
| 2017-02-22 | 4058.82 | 未披露 |
更多>>
from December 31, 2015 to December 31, 2016
Net issuance under employee stock plans
Purchases of common stock
|
2016-12-31 |
| 2016-11-01 | 4060.89 | 未披露 | 定期报告 | 2016-10-20 |
| 2016-11-01 | 4059.68 | 未披露 | 定期报告 | 2016-09-30 |
| 2016-08-01 | 4063.80 | 未披露 | 定期报告 | 2016-06-30 |
| 2016-05-04 | 3984.38 | 未披露 | 定期报告 | 2016-04-26 |
| 2016-05-04 | 3982.91 | 未披露 | 定期报告 | 2016-03-31 |
| 2016-03-22 | 3982.42 | 未披露 | 定期报告 | 2016-03-08 |
| 2016-02-25 | 3997.20 | 未披露 | 定期报告 | 2016-02-10 |
| 2016-02-25 | 4052.69 | 未披露 |
更多>>
from December 31, 2014 to December 31, 2015
Net issuance under employee stock plans
Purchases of common stock
|
2015-12-31 |
| 2015-10-28 | 4094.32 | 未披露 | 定期报告 | 2015-10-20 |
| 2015-10-28 | 4092.40 | 未披露 | 定期报告 | 2015-09-30 |
| 2015-08-03 | 4078.93 | 未披露 | 定期报告 | 2015-07-29 |
| 2015-08-03 | 4078.91 | 未披露 | 定期报告 | 2015-06-30 |
| 2015-05-06 | 4038.44 | 未披露 | 定期报告 | 2015-04-30 |
| 2015-05-06 | 4037.51 | 未披露 | 定期报告 | 2015-03-31 |
| 2015-03-30 | 4036.23 | 未披露 | 定期报告 | 2015-03-16 |
| 2015-02-24 | 4036.18 | 未披露 | 定期报告 | 2015-02-17 |
| 2015-02-24 | 4036.01 | 未披露 |
更多>>
from December 31, 2013 to December 31, 2014
Net issuance under employee stock plans
|
2014-12-31 |
| 2014-10-29 | 4021.74 | 未披露 | 定期报告 | 2014-10-24 |
| 2014-10-29 | 4023.26 | 未披露 | 定期报告 | 2014-09-30 |
| 2014-07-31 | 4022.19 | 未披露 | 定期报告 | 2014-07-25 |
| 2014-07-31 | 4021.07 | 未披露 | 定期报告 | 2014-06-30 |
| 2014-05-05 | 4003.95 | 未披露 | 定期报告 | 2014-04-25 |
| 2014-05-05 | 4001.52 | 未披露 | 定期报告 | 2014-03-31 |
| 2014-03-20 | 3999.99 | 未披露 | 定期报告 | 2014-03-14 |
| 2014-02-28 | 3984.62 | 未披露 | 定期报告 | 2014-02-18 |
| 2014-02-28 | 3966.62 | 未披露 |
更多>>
from December 31, 2012 to December 31, 2013
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
|
2013-12-31 |
| 2013-11-08 | 3924.52 | 未披露 | 定期报告 | 2013-11-01 |
| 2013-11-04 | 3924.63 | 未披露 | 定期报告 | 2013-10-24 |
| 2013-11-08 | 3924.78 | 未披露 | 定期报告 | 2013-09-30 |
| 2013-11-04 | 3925.47 | 未披露 | 定期报告 | 2013-06-30 |
| 2013-11-04 | 3930.43 | 未披露 | 定期报告 | 2013-03-31 |
| 2013-11-04 | 3932.85 | 未披露 |
更多>>
from December 31, 2011 to December 31, 2012
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
|
2012-12-31 |
| 2013-11-04 | 3933.45 | 未披露 | 定期报告 | 2012-09-30 |
| 2012-07-27 | 3915.66 | 未披露 | 定期报告 | 2012-07-23 |
| 2012-07-27 | 3914.31 | 未披露 | 定期报告 | 2012-06-30 |
| 2012-05-09 | 3885.75 | 未披露 | 定期报告 | 2012-05-07 |
| 2012-05-09 | 3878.76 | 未披露 | 定期报告 | 2012-03-31 |
| 2012-02-22 | 3876.72 | 未披露 | 定期报告 | 2012-02-21 |
| 2012-02-22 | 3876.84 | 未披露 |
更多>>
from December 31, 2010 to December 31, 2011
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
Treasury stock
Debt Conversion
|
2011-12-31 |
| 2011-10-31 | 3871.72 | 未披露 | 定期报告 | 2011-10-25 |
| 2011-08-01 | 4105.55 | 未披露 | 定期报告 | 2011-07-26 |
| 2011-04-29 | 4073.92 | 未披露 | 定期报告 | 2011-04-28 |
| 2011-02-24 | 4061.60 | 未披露 | 定期报告 | 2011-02-22 |
| 2011-02-24 | 4033.80 | 未披露 |
更多>>
from December 31, 2009 to December 31, 2010
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
Treasury stock
|
2010-12-31 |
| 2010-10-28 | 3990.40 | 未披露 | 定期报告 | 2010-10-27 |
| 2010-07-29 | 4087.73 | 未披露 | 定期报告 | 2010-07-27 |
| 2010-02-24 | 3992.95 | 未披露 | 定期报告 | 2010-02-22 |
| 2010-02-24 | 3900.31 | 未披露 |
更多>>
from December 31, 2008 to December 31, 2009
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
Issuance of common stock
|
2009-12-31 |
| 2009-03-02 | 3217.60 | 未披露 | 定期报告 | 2009-02-26 |
| 2009-03-02 | 3218.76 | 未披露 |
更多>>
from December 31, 2007 to December 31, 2008
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
|
2008-12-31 |
| 2008-02-28 | 3186.56 | 未披露 | 定期报告 | 2008-02-25 |
| 2008-02-28 | 3182.39 | 未披露 |
更多>>
from December 31, 2006 to December 31, 2007
Exercise of stock options and stock issuances under stock purchase plan
Issuance, vesting, and cancellation of restricted stock
|
2007-12-31 |
| 2007-02-28 | 3114.78 | 未披露 | 定期报告 | 2007-02-20 |
| 2007-02-28 | 3111.86 | 未披露 |
更多>>
from December 31, 2005 to December 31, 2006
Exercise of stock options and stock issuances under stock purchase plan
Issuance, vesting and cancellation of restricted stock
|
2006-12-31 |
| 2006-03-01 | 3015.19 | 未披露 | 定期报告 | 2006-02-28 |
| 2006-03-01 | 3006.02 | 未披露 |
更多>>
from December 31,2004 to December 31,2005
Exercise of stock options and stock issuances under stock purchase plan
Issuance of restricted stock
|
2005-12-31 |
| 2005-03-16 | 2985.84 | 未披露 | 定期报告 | 2005-03-10 |
| 2005-03-16 | 2984.83 | 未披露 |
更多>>
from December 31, 2003 to December 31, 2004
Exercise of stock options and stock issuances under stock purchase plan
|
2004-12-31 |
| 2004-03-12 | 2961.84 | 未披露 | 定期报告 | 2004-03-04 |
| 2004-03-12 | 2951.38 | 未披露 |
更多>>
from December 31, 2002 to December 31, 2003
Exercise of stock options and stock issuances under stock purchase plan
|
2003-12-31 |
| 2003-03-27 | 2922.51 | 未披露 | 定期报告 | 2003-03-20 |
| 2003-03-27 | 2922.14 | 未披露 |
更多>>
from December 31, 2001 to December 31, 2002
Exercise of stock options and stock issuances under stock purchase plan
|
2002-12-31 |
| 2002-03-27 | 2902.70 | 未披露 | 定期报告 | 2002-03-12 |
| 2002-03-27 | 2900.67 | 未披露 |
更多>>
from December 31, 2000 to December 31, 2001
Exercise of stock options and stock issuances under stock purchase plan
Stock issued in connection with the Applied Epi acquisition
|
2001-12-31 |
| 2001-03-14 | 2468.33 | 未披露 | 定期报告 | 2001-02-20 |
| 2001-03-14 | 2466.27 | 未披露 |
更多>>
from December 31, 1999 to December 31, 2000
Adjustment to reflect change in year-end for CVC
Exercise of stock options and stock issuances under stock purchase plan
Stock issued in connection with the Monarch merger
|
2000-12-31 |
| 2000-03-15 | 1808.25 | 未披露 | 定期报告 | 2000-03-01 |
| 2000-03-15 | 1762.77 | 未披露 |
更多>>
from December 31,1998 to December 31,1999
Exercise of stock options and stock issuances under stock purchase plan
Net proceeds from public offering
|
1999-12-31 |
| 1999-03-29 | 1589.08 | 未披露 | 定期报告 | 1999-03-19 |
| 1999-03-29 | 1484.10 | 未披露 |
更多>>
from December 31, 1997 to December 31, 1998
Exercise of stock options and stock issuances under stock purchase plan
|
1998-12-31 |
| 1998-03-31 | 896.32 | 未披露 | 定期报告 | 1998-03-02 |
| 1998-03-31 | 889.20 | 未披露 |
更多>>
from December 31, 1996 to December 31, 1997
Exercise of stock options and stock issuances under stock purchase plan
|
1997-12-31 |
| 1997-03-04 | 587.06 | 未披露 | 定期报告 | 1997-02-24 |
| 1997-03-04 | 583.60 | 未披露 |
更多>>
from December 31, 1995 to December 31, 1996
Exercise of stock options and stock issuances under stock purchase plan
|
1996-12-31 |
| 1997-03-04 | 578.72 | 未披露 |
更多>>
from December 31, 1994 to December 31, 1995
Exercise of stock options
Net proceeds from public offering
|
1995-12-31 |
From June 30, 2025 to September 30, 2025
Net issuance under employee stock plans
From March 31, 2025 to June 30, 2025
Settlement of the 2027 Notes
Net issuance under employee stock plans
From December 31, 2024 to March 31, 2025
Net issuance under employee stock plans
Settlement of the 2025 Notes
From December 31, 2023 to December 31, 2024
Net issuance under employee stock plans
From June 30, 2024 to September 30, 2024
Net issuance under employee stock plans
From March 31, 2024 to June 30, 2024
Net issuance under employee stock plans
From December 31, 2023 to March 31, 2024
Net issuance under employee stock plans
From December 31, 2022 to December 31, 2023
Net issuance under employee stock plans
Partial extinguishment of 2025 and 2027 Notes
From June 30, 2023 to September 30, 2023
Net issuance under employee stock plans
From March 31, 2023 to June 30, 2023
Net issuance under employee stock plans
Partial extinguishment of 2025 and 2027 Notes
From December 31, 2022 to March 31, 2023
Net issuance under employee stock plans
From December 31, 2021 to December 31, 2022
Net issuance under employee stock plans
From June 30, 2022 to September 30, 2022
Net issuance under employee stock plans
From March 31, 2022 to June 30, 2022
Net issuance under employee stock plans
From December 31, 2021 to March 31, 2022
Net issuance under employee stock plans
From December 31, 2020 to December 31, 2021
Net issuance under employee stock plans
From June 30, 2021 to September 30, 2021
Net issuance under employee stock plans
From March 31, 2021 to June 30, 2021
Net issuance under employee stock plans
from December 31, 2020 to March 31, 2021
Net issuance under employee stock plans
From December 31, 2019 to December 31, 2020
Net issuance under employee stock plans
From June 30,2020 to September 30,2020
Net issuance under employee stock plans
From March 31, 2020 to June 30, 2020
Net issuance under employee stock plans
from December 31, 2019 to March 31, 2020
Net issuance under employee stock plans
from December 31, 2018 to December 31, 2019
Net issuance under employee stock plans
from June 30, 2019 to September 30, 2019
Net issuance under employee stock plans
from March 31, 2019 to June 30, 2019
Net issuance under employee stock plans
from December 31, 2018 to March 31, 2019
Net issuance under employee stock plans
from December 31, 2017 to December 31, 2018
Net issuance under employee stock plans
Purchases of common stock
from December 31, 2016 to December 31, 2017
Net issuance under employee stock plans
Stock issuance for business acquisition
Purchases of common stock
from December 31, 2015 to December 31, 2016
Net issuance under employee stock plans
Purchases of common stock
from December 31, 2014 to December 31, 2015
Net issuance under employee stock plans
Purchases of common stock
from December 31, 2013 to December 31, 2014
Net issuance under employee stock plans
from December 31, 2012 to December 31, 2013
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
from December 31, 2011 to December 31, 2012
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
from December 31, 2010 to December 31, 2011
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
Treasury stock
Debt Conversion
from December 31, 2009 to December 31, 2010
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
Treasury stock
from December 31, 2008 to December 31, 2009
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
Issuance of common stock
from December 31, 2007 to December 31, 2008
Exercise of stock options
Issuance, vesting and cancellation of restricted stock
from December 31, 2006 to December 31, 2007
Exercise of stock options and stock issuances under stock purchase plan
Issuance, vesting, and cancellation of restricted stock
from December 31, 2005 to December 31, 2006
Exercise of stock options and stock issuances under stock purchase plan
Issuance, vesting and cancellation of restricted stock
from December 31,2004 to December 31,2005
Exercise of stock options and stock issuances under stock purchase plan
Issuance of restricted stock
from December 31, 2003 to December 31, 2004
Exercise of stock options and stock issuances under stock purchase plan
from December 31, 2002 to December 31, 2003
Exercise of stock options and stock issuances under stock purchase plan
from December 31, 2001 to December 31, 2002
Exercise of stock options and stock issuances under stock purchase plan
from December 31, 2000 to December 31, 2001
Exercise of stock options and stock issuances under stock purchase plan
Stock issued in connection with the Applied Epi acquisition
from December 31, 1999 to December 31, 2000
Adjustment to reflect change in year-end for CVC
Exercise of stock options and stock issuances under stock purchase plan
Stock issued in connection with the Monarch merger
from December 31,1998 to December 31,1999
Exercise of stock options and stock issuances under stock purchase plan
Net proceeds from public offering
from December 31, 1997 to December 31, 1998
Exercise of stock options and stock issuances under stock purchase plan
from December 31, 1996 to December 31, 1997
Exercise of stock options and stock issuances under stock purchase plan
from December 31, 1995 to December 31, 1996
Exercise of stock options and stock issuances under stock purchase plan
from December 31, 1994 to December 31, 1995
Exercise of stock options
Net proceeds from public offering