[{"thspj":"\u4e70\u5165","title":"\u897f\u90e8\u8bc1\u5238\uff1a\u9996\u6b21\u8986\u76d6\u62a5\u544a\uff1a\u534a\u5bfc\u4f53\u63a2\u9488\u5361\u56fd\u5185\u9f99\u5934\uff0c\u7834\u5c40MEMS\u63a2\u9488\u5361\u6d77\u5916\u5784\u65ad","source":"\u897f\u90e8\u8bc1\u5238","researcher":"\u845b\u7acb\u51ef","date":"2026-04-24","url":"http:\/\/news.10jqka.com.cn\/field\/sr\/19700101\/57646333.shtml"}]